品牌:Neocera
The Magma SSM HiRes tool provides two sensors giving the best of both worlds: world-class spatial localization and world-class sensitivity.
| Feature | Details |
| SQUID | |
| Short Defect Localization (SQUID) | 3um |
| Spatial Resolution (SQUID) | 2um |
| Total Scanning Area (SQUID) | At least 100mm by 100mm |
| Current Sensitivity (SQUID) |
|
| Magnetic Sensitivity (SQUID) | 15 pT/√Hz Typical |
| Imaging Depth (SQUID) | 10mm |
| Operating Frequency (SQUID) | DC to 25kHz |
| HiRes Sensor | |
| Short Defect Localization (HiRes) | 250nm |
| Spatial Resolution (HiRes) | 500nm |
| Total Scanning Area (HiRes) | At least 100mm by 100mm |
| Current Sensitivity (HiRes) |
|
| Magnetic Sensitivity (HiRes) | 10nT/√Hz Typical |
| Operating Frequency (HiRes) | 10kHz to 200kHz |
| Imaging Depth (HiRes) | <100um |
| General | |
| IF Function Generator | ±10V @ 100mA |
| IF Function Generator Frequency | DC to 200kHz |
| Camera Resolution | 2um (in NIR or Visible) |
| System Power |
|
| System Operating System | Windows 10 64-bit |
Cost-Effective localization of shorts and leakages in dies, device packages and PC boards
The Magma Scanning SQUID Microscope (SSM) HiRes is a dual magnetic sensor system that extends the SSM tool capability to dies (either on full wafers, or in complex 3D TSV or wire bond devices). Magma SSM HiRes creates current images of devices at the die, package and PC board level using non-destructive techniques. Current images can then be used in conjunction with optical fiducials and design data to localize static defects in three dimensions. The SSM HiRes combines the sensitivity of a super-conducting quantum interference device sensor, or SQUID, with a high resolution magnetoresistive sensor. This allows for a two-step approach whereby the magnetic fields generated by currents inside of the device can be mapped very quickly with the SQUID and then again with high precision and resolution with the high resolution sensor. As magnetic fields permeate most materials used in typical devices, there is no need to deprocess the device in any way to begin localizing the failure. Additionally, Magma requires very small currents, nanoamps for the SQUID and microamps for the high resolution sensor. Using such small currents can protect the device under test from further damage and may be the only option when trying to detect failures in circuits with very high resistance (>100kΩ). Typical failures that can be analyzed with the SSM HiRes tool include shorts, leakages and resistive opens. The system can be used to image AC and/or DC magnetic fields (and likewise, currents) depending on the requirements of the device.
微信二维码
一家总部位于美国阿尔伯克基市的国际性原子层沉积(ALD) 设备制造商;正朝着现代企业的方向与时间一同前进。
以“真诚、务实”为企业宗旨,竭诚为各界人士服务。
Copyright © 厦门公海555000科技有限公司 All Rights Reserved 备案号:闽ICP备15347854号-1